MEMS foundry

MAGELAN

Foundry TDK Tronics 1500x37.5
Standard inertial MEMS foundry for 1 to 6-axis

Magelan, as an open MEMS foundry platform with Vacuum/Hermetic WLP enables the production of industrial, automotive and aerospace-grade capacitive MEMS inertial dies.

Magelan Inertial MEMS foundry

With a world-class engineering team, well-established MEMS methodologies, and vast manufacturing experience, Tronics Microsystems provides low-risk services, first-time success, and record yield to production, enabling customers fast time-to-market.

Benefits of our process capabilities

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MEMS Design Kit

We offer you flexible R&D kit, and are prepared to develop customized process variations to achieve manufacturable solutions meeting your requirements

Foundry capabilities high quality & fast 2 100x100
Hight quality & fast delivery

We offer you highly professional production capability with respect to quality, reliability, high volumes, steep ramp-ups and long-term delivery

Foundry capabilities reduced time to market 100x100
Reduced time to market

Having access to probably the broadest technology portfolio among MEMS suppliers accelerates your MEMS development

Main offerings and Highlights

  • 1 to 6-axis MEMS designs
  • High reliability thanks to  WLP with getter
  • Small die size and low cost
  • Ease of integration with standard wire-bonding
  • Record manufacturing yield
  • A project schedule can vary between 16 to 24 weeks from kickoff to delivery
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Ultimate reliability and temperature stability

Pioneer on thick SOI and vacuum WLP

Foundry Magelan thick SOI DRIE 1280x960 1
  • 20µm to 100µm thick SOI thickness
  • DRIE with High Aspect Ratio up to 1:30
  • WLP with Vacuum <10mTorr with getter for stable Q factor of 10s of thousands
  • 100% static and dynamic test including frequency and Q Factor tests
foundry DRIE on thick cavity SOI process
  • Recognized technology leader for inertial MEMS on SOI
  • 20 years production of accels and gyros
  • Stiction-free release of capacitive structures
Foundry High vacuum packaging reliability data 1536x949
  • WLP to ensure the long term reliability of the devices manufactured by Magelan
  • High vacuum WLP solutions with in-house deposited integrated getter
  •  long term stable and reliable vacuum <10mTorr
Inertial MEMS foundry platform
  • EN 9100 certified quality system
  • AEC-Q100 reliability tests
  • Faster design cycles with established design kit and layout support
  • Fast qualification and ramp up to production with process already qualified in production

Track record in first-time

track

The track record in first silicon right demonstrates that the vast majority achieved “first-time-right” success and attained high yield rates.

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